Products
OEM solutions, modules, components, ...
Based on extended experience in automation and vacuum technology and driven by the customers request for higher quality and productivity as well as lower productions costs the Adenso team permanently develops new products and solutions:
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WHR-VAC Wafer Handling Robot Wafer Handling Robot optimized for highest load, prcesicion and vacuum. |
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WHM-VAC Wafer Handling Module Handling Module consist of a main vacuum chamber with integrated Wafer Handling Robot WHR-VAC. |
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LLM - Load Lock Module Customized substrate stocker system for high vacuum environment. |
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CPS 4 - Cluster Processing System Customized cluster system for research and production use, 4 port type. |
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CPS 6 - Cluster Processing System Customized cluster system for research and production use, 6 port type (up to 12 ports available). |
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HSV - Highvacuum-Slide-Valves Customized high vacuum valves, slide type, with a large number of options. |
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HFV - Highvacuum-Flap-Valves Customized high vacuum valves, flap type, with a large number of options. |
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HUV - Highvacuum-Universal-Valves Customized special high vacuum valves, mostly consist of a combination of flap and slide priciples. |
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